Modeling electrodeposition for LIGA microdevice fabrication.

Autor: Griffiths, S. K., Nilson, R. H., Ting, A., Bradshaw, R. W., Bonivert, W. D., Hruby, J. M.
Zdroj: Microsystem Technologies; Feb1998, Vol. 4 Issue 2, p98-101, 4p
Databáze: Complementary Index