| Abstrakt: |
Special features of the application of a mass spectroscopic method to analysis of ionized components of the plasma of a vacuum-arc discharge are discussed. The intensities of N+, O, Ar+, TiN+, and TiO+ ions as functions of the pressure of the corresponding neutral gas and the magnitude of the magnetic-field strength on the cathode surface are measured. The average energy of the N+ and TiN+ ions as measured with an electrostatic probe is equal to ≈25 eV. The number of the N+, O+, TiN+, and TiO+ ions that emerge on the cathode and propagate in the direction of the substrate is tenths of a percent of the number of metal ions, which confirms the mechanism of reactive vacuum-arc coating forming directly on the substrate. [ABSTRACT FROM AUTHOR] |
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