Sputtering Si-Co alloy targets.

Autor: Kolesnikov, I., Freidin, B., Serba, V., Kuz’mich, Yu., Rogachev, D.
Zdroj: Russian Metallurgy (Metally); Dec2008, Vol. 2008 Issue 6, p529-532, 4p
Abstrakt: The effect of the cooling rate on the microstructure, micromechanical characteristics, and residual thermal stresses of targets from a Si-30% Co alloy is studied. The required quality of the targets from this alloy can be obtained at a cooling rate in the range 5–50°C/s. The alloy structure is homogeneous and fine-grained and is characterized by high strength properties. The level of residual stresses in the target is minimal, and their distribution is uniform. [ABSTRACT FROM AUTHOR]
Databáze: Complementary Index