| Autor: |
Po-Ying Li, Sheybani, Roya, Gutierrez, Christian A., Kuo, Jonathan T. W., Meng, Ellis |
| Předmět: |
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| Zdroj: |
Journal of Microelectromechanical Systems; Feb2010, Vol. 19 Issue 1, p215-228, 14p, 5 Black and White Photographs, 5 Charts, 15 Graphs |
| Abstrakt: |
We present the first electrochemical actuator with Parylene bellows for large-deflection operation. The bellows diaphragm was fabricated using a polyethylene-glycol-based sacrificial molding technique followed by coating in Parylene C. Bellows were mechanically characterized and integrated with a pair of interdigitated electrodes to form an electrochemical actuator that is suitable for low-power pumping of fluids. Pump performance (gas generation rate and pump efficiency) was optimized through a careful examination of geometrical factors. Overall, a maximum pump efficiency of 90% was achieved in the case of electroplated electrodes, and a deflection of over 1.5 mm was demonstrated. Real-time wireless operation was achieved. The complete fabrication process and the materials used in this actuator are bio-compatible, which makes it suitable for biological and medical applications. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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