| Autor: |
Marinenko, R. B., Armstrong, J., Kaiser, D. L., Ritter, J. J., Schenck, P. K., Bouldin, C., Blendell, J. E., Levin, I. |
| Předmět: |
|
| Zdroj: |
AIP Conference Proceedings; 2001, Vol. 550 Issue 1, p164, 5p |
| Abstrakt: |
Barium strontium titanate (BST) thin films of varying composition and thickness (5 nm to 400 nm) on (100)Si or Pt/(100)Si substrates were measured using an electron microprobe analyzer with wavelength dispersive x-ray spectrometers. Most of the films were fabricated at NIST by a metalorganic deposition approach. Several films from external sources that were fabricated by sputtering or metalorganic chemical vapor deposition were also measured. For some of the films, the compositions determined by electron microprobe were in good agreement with the nominal compositions provided by the film suppliers. However, for other films, including the thinnest ones, there were discrepancies between the measured and nominal compositions and thicknesses. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
|
