| Autor: |
Stoner, Robert J., Morath, Christopher J., Tas, Guray, Mair, Robin, Merchant, Sailesh M., Maris, Humphrey J. |
| Předmět: |
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| Zdroj: |
AIP Conference Proceedings; 2001, Vol. 550 Issue 1, p468, 10p |
| Abstrakt: |
We discuss the use of the picosecond ultrasonics technique for characterizing several challenging processes which are common in sub-0.18 micron processes. Specific processes considered are reactive TaN, RTP-CoSi[sub 2], and damascene copper. We describe the transition from one- to two-dimensional acoustical excitations in damascene copper lines, and show how picosecond ultrasonics measurements can be used in to make high throughput, all-optical copper line CD measurements. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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