| Autor: |
Rietman, Edward A., Whitlock, Stephen A., Beachy, Milton, Roy, Andrew, Willingham, Timothy L. |
| Předmět: |
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| Zdroj: |
IEEE Transactions on Semiconductor Manufacturing; Feb2001, Vol. 14 Issue 1, p32, 16p, 4 Diagrams, 2 Charts, 5 Graphs |
| Abstrakt: |
Presents a system model for feedback control and analysis of yield capable of producing Pareto charts for yield metrics. Implementation of system in a Lucent Technologies microelectronics laboratory; Determination of yield metrics; Conduction of online Pareto analysis with a learning machine model. |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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