Ultraclean etching of GaAs by HCI gas and in situ overgrowth of (AI)GaAs by molecular beam epitaxy.

Autor: Kadoya, Y., Yoshida, T., Noge, H., Sakaki, H.
Předmět:
Zdroj: Journal of Applied Physics; 1/1/1998, Vol. 83 Issue 1, p567, 10p, 16 Black and White Photographs, 2 Diagrams, 2 Charts, 9 Graphs
Abstrakt: Analyzes the etching of GaAs by HCI gas with emphasis on the quality of the heterointerfaces formed by the direct overgrowth of A1GaAs on the etched GaAs surfaces in an ultrahigh vacuum processing system. Details on the sample preparation procedures; Description of the properties of the interfaces.
Databáze: Complementary Index