Gated pinhole camera imaging of the high-energy ions emitted by a discharge produced Sn plasma for extreme ultraviolet generation.

Autor: Gielissen, K., Sidelnikov, Y., Glushkov, D., Soer, W. A., Banine, V., v. d. Mullen, J. J. A. M.
Předmět:
Zdroj: Journal of Applied Physics; Oct2009, Vol. 106 Issue 8, p083301-083307, 6p, 2 Black and White Photographs, 4 Diagrams, 1 Graph
Abstrakt: The origin and nature of the high-energy ions emitted by a discharge produced plasma source are studied using gated pinhole camera imaging. Time-of-flight analysis in combination with Faraday cup measurements enables characterization of the high-velocity component of the ionic debris. The use of an optional magnetic field allows mass-to-charge analysis of the first part of the Faraday cup signal. It is shown that this consists mainly of oxygen ions emitted from a region near the cathode. Time-resolved images of Sn ions with a kinetic energy of 45 keV visualize the regions in between the electrodes where the high-energy ion generation takes place. [ABSTRACT FROM AUTHOR]
Databáze: Complementary Index