| Autor: |
Stegmann, Heiko, Ritz, Yvonne, Utess, Dirk, Hübner, René, Zschech, Ehrenfried |
| Předmět: |
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| Zdroj: |
AIP Conference Proceedings; 9/28/2009, Vol. 1173 Issue 1, p275-279, 5p, 5 Black and White Photographs, 1 Diagram, 2 Graphs |
| Abstrakt: |
Sample preparation is a critical step in transmission electron microscopy (TEM) that significantly determines the quality of structural characterization and analysis of a specimen. In recent years, the accuracy and quality requirements for the preparation of TEM cross-sections of nanoelectronic structures have drastically increased. Combining a focused low-energy noble gas ion beam column with a FIB and a SEM column in a three beam system meets these requirements. It provides precise target preparation as well as minimum thickness and surface damage of the TEM sample. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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