Self-sustained secondary discharge in inductively coupled plasma reactor.

Autor: Walewski, Joachim, Larjo, Jussi, Hernberg, Rolf
Předmět:
Zdroj: Applied Physics Letters; 5/1/2000, Vol. 76 Issue 18
Abstrakt: This work reports on observations of intense atomic line radiation near a substrate during diamond film growth in an inductively coupled thermal plasma. Evidence is given, indicating that the radiation is caused by electron collisions which are driven by the radio-frequency field. © 2000 American Institute of Physics. [ABSTRACT FROM AUTHOR]
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