Electron energy distribution function measurements in a planar inductive oxygen radio frequency....
| Autor: | Barnes, Michael S., Forster, John C., Keller, John H. |
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| Zdroj: | Applied Physics Letters; 5/24/1993, Vol. 62 Issue 21, p2622, 3p, 2 Diagrams, 3 Graphs |
| Abstrakt: | Examines the planar oxygen glow discharge as a function of pressure using Langmuir probe. Use of Langmuir probes to measure electron energy distribution functions (EEDF); Consideration of glow discharge plasmas for semiconductor manufacturing; Plot of EEDF for oxygen discharges. |
| Databáze: | Complementary Index |
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