Scanning force microscopy measurement of edge growth rate enhancement in selective area epitaxy.

Autor: Cotta, M.A., Hamm, R.A., Staley, T.W., Yadvish, R.D., Harriott, L.R., Temkin, H.
Předmět:
Zdroj: Applied Physics Letters; 2/1/1993, Vol. 62 Issue 5, p496, 3p, 1 Chart, 4 Graphs
Abstrakt: Examines the edge growth rate enhancement of indium phosphide and lattice matched indium gallium arsenide layers grown on silica-masked InP substrate. Growth of the sample by metalorganic molecular beam epitaxy; Use of scanning force microscopy; Dependence of the migration length on metalorganic and hydride flows.
Databáze: Complementary Index