Direct current-94.92 MHz hybrid plasma magnetron sputtering for fabrication of....

Autor: Ito, W., Okayama, S., Homma, N., Oishi, A., Morishita, T.
Předmět:
Zdroj: Applied Physics Letters; 1/18/1993, Vol. 62 Issue 3, p312, 3p, 1 Chart, 6 Graphs
Abstrakt: Examines YBa[sub 2]Cu[sub 3]O[sub 7-x] thin films using a designed dc-94.92 MHz hybrid plasma magnetron sputtering system. Implication of the cathode current for film crystalline orientation; Indication of increased emission line intensity through optical emission spectroscopy; Discussion on the crystallinity of films.
Databáze: Complementary Index