Surface topography changes during the growth of GaAs by molecular beam epitaxy.

Autor: Smith, G.W., Pidduck, A.J., Whitehouse, C.R., Glasper, J.L., Keir, A.M., Pickering, C.
Předmět:
Zdroj: Applied Physics Letters; 12/16/1991, Vol. 59 Issue 25, p3282, 3p, 5 Graphs
Abstrakt: Presents the surface topography changes during the growth of GaAs by molecular beam epitaxy. Observation of the laser light scattering (LLS) features using atomic force microscopy (AFM); Application of in situ LLS and ex situ AFM; Mechanisms leading to surface roughening during epitaxial growth.
Databáze: Complementary Index