Direct observation of ions in laser plume onto the substrate.

Autor:	Izumi, H., Ohata, K., Sawada, T., Morishita, T., Tanaka, S.
Předmět:	IONS THIN films TIME-of-flight mass spectrometry
Zdroj:	Applied Physics Letters; 7/29/1991, Vol. 59 Issue 5, p597, 3p, 5 Graphs
Abstrakt:	Characterizes the ions in the laser plume of YBa[sub 2]Cu[sub 3]O[sub 7-delta] thin films. Use of time-of-flight mass spectroscopy; Kinetics of film formation; Analysis of ion energies.
Databáze:	Complementary Index
Externí odkaz:	Zobrazit plný text záznamu