Autor: |
Sommerer, Timothy J., Barnes, Michael S., Keller, John H., McCaughey, Michael J., Kushner, Mark J. |
Předmět: |
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Zdroj: |
Applied Physics Letters; 8/5/1991, Vol. 59 Issue 6, p638, 3p, 4 Graphs |
Abstrakt: |
Investigates the accumulation of dust particles near the sheath-plasma boundary in both radio-frequency and direct-current discharges. Development of Monte-Carlo fluid simulation; Investigation of the dynamics of particulate contamination; Domination of Coulomb interaction over particle transport. |
Databáze: |
Complementary Index |
Externí odkaz: |
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