Monte Carlo-fluid hybrid model of the accumulation of dust particles at sheath edges in....

Autor: Sommerer, Timothy J., Barnes, Michael S., Keller, John H., McCaughey, Michael J., Kushner, Mark J.
Předmět:
Zdroj: Applied Physics Letters; 8/5/1991, Vol. 59 Issue 6, p638, 3p, 4 Graphs
Abstrakt: Investigates the accumulation of dust particles near the sheath-plasma boundary in both radio-frequency and direct-current discharges. Development of Monte-Carlo fluid simulation; Investigation of the dynamics of particulate contamination; Domination of Coulomb interaction over particle transport.
Databáze: Complementary Index