Measurement of partial pressures in extremely high vacuum region using a modified residual gas...

Autor: Watanabe, Shu, Oyama, Hitoshi, Kato, Shigeki, Aono, Masakazu
Předmět:
Zdroj: Review of Scientific Instruments; Mar99, Vol. 70 Issue 3, p1880, 6p, 1 Diagram, 1 Chart, 11 Graphs
Abstrakt: Explores problems concerning the measurement of partial pressures using a residual gas analyzer (RGA) in an extremely high vacuum (XHV) region. Influence of electron stimulated desorption ions; Outgassing rate from the ion source of the RGA; Modification of a commercial RGA.
Databáze: Complementary Index