Autor: |
Watanabe, Shu, Oyama, Hitoshi, Kato, Shigeki, Aono, Masakazu |
Předmět: |
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Zdroj: |
Review of Scientific Instruments; Mar99, Vol. 70 Issue 3, p1880, 6p, 1 Diagram, 1 Chart, 11 Graphs |
Abstrakt: |
Explores problems concerning the measurement of partial pressures using a residual gas analyzer (RGA) in an extremely high vacuum (XHV) region. Influence of electron stimulated desorption ions; Outgassing rate from the ion source of the RGA; Modification of a commercial RGA. |
Databáze: |
Complementary Index |
Externí odkaz: |
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