Strain characterization of CoSi[sub 2]/n-Si[sub 0.9]Ge[sub 0.1]p-Si heterostructures.

Autor: Nur, O., Willander, M., Radamson, H.H., Sardela Jr., M.R., Hansson, G.V., Petersson, C.S., Maex, K.
Předmět:
Zdroj: Applied Physics Letters; 1/24/1994, Vol. 64 Issue 4, p440, 3p, 4 Diagrams, 1 Graph
Abstrakt: Characterizes the cobalt silicides/n-silicides germanium/p-silicides heterostructures. Combination of silicon molecular beam epitaxy with cobalt sputtering; Application of high-resolution x-ray diffraction mapping in SiGe strain investigation; Obtainment of transistor action with low-current gain.
Databáze: Complementary Index