Effects of deposition parameters on the refractive index in plasma polymerized methyl....
| Autor: | Tobin, J.A., Denton, D.D. |
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| Zdroj: | Applied Physics Letters; 5/25/1992, Vol. 60 Issue 21, p2595, 3p, 3 Graphs |
| Abstrakt: | Investigates the plasma polymerization of methyl methacrylate for use in microelectronic and photonic application. Effects of varying radio frequency power and neutral pressure on deposition rate and refractive index; Measurement of the index of refraction and thickness of the films. |
| Databáze: | Complementary Index |
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