| Autor: |
Indermuhle, P.-F., Schurmann, G., Racine, G.-A., de Rooij, N.F. |
| Předmět: |
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| Zdroj: |
Applied Physics Letters; 4/28/1997, Vol. 70 Issue 17, p2318, 3p, 1 Black and White Photograph, 2 Graphs |
| Abstrakt: |
Examines the fabrication of cantilevers with integrated tip and self-exciting piezoelectric sensors for atomic force microscopy imaging. Use of monocrystalline silicon machining; Homogeneity of the tip achieved by wet etching technique; Mechanical and electrical properties of individual cantilevers. |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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