Self-limiting oxidation for fabricating sub-5 nm silicon nanowires.

Autor: Liu, H.I., Biegelsen, D.K., Ponce, F.A., Johnson, N.M., Pease, R.F.W.
Předmět:
Zdroj: Applied Physics Letters; 3/14/1994, Vol. 64 Issue 11, p1383, 3p, 2 Diagrams, 4 Graphs
Abstrakt: Examines the techniques for fabricating sub-five nanometer silicon nanowires. Use of the materials for analysis of optical and electrical properties; Characterization of fabricated structures by transmission electron microscopy; Mechanism of the self-limiting oxidation phenomenon of the nanostructures.
Databáze: Complementary Index