Using phthalocyanine precursors to prepare oxide thin films: Decoupling the growth rate from the....
| Autor: | Machler, E., Arrouy, F. |
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| Zdroj: | Applied Physics Letters; 8/4/1997, Vol. 71 Issue 5, p710, 3p, 1 Diagram, 3 Graphs |
| Abstrakt: | Proposes the use of phthalocyanine precursors for chemical beam epitaxy deposition techniques. Deposition processes involving metal organic compounds; Illustration of the use of phthalocyanine precursors by the growth of cupric oxide and YBa[sub 2]Cu[sub 3]O[sub 7] thin films; Decomposition of the molecules through a beam of activated species. |
| Databáze: | Complementary Index |
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