Study of mechanism to control electrical properties of AlAs grown using amine-alane with....
| Autor: | Miyakoshi, Kaoru, Suemune, Ikuo |
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| Zdroj: | Applied Physics Letters; 3/21/1994, Vol. 64 Issue 12, p1549, 3p, 6 Graphs |
| Abstrakt: | Examines the mechanism to control electrical properties of aluminum arsenide films grown by metalorganic molecular beam epitaxy. Critical dependence of electrical properties on the supply ratio of the precursor; Factor to control the electrical properties; Decomposition of the trimethylamine on aluminum surface. |
| Databáze: | Complementary Index |
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