Use of a random phase plate s a KrF laser beam homogenizer for thin film deposition applications.

Autor: Lewis, C.L.S., Weaver, I., Doyle, L.A., Martin, G.W., Morrow, T., Pepler, D.A., Danson, C.N., Ross, I.N.
Předmět:
Zdroj: Review of Scientific Instruments; Apr99, Vol. 70 Issue 4, p2116, 6p, 3 Diagrams, 3 Graphs
Abstrakt: Presents an application of the random phase plate (RPP) technique to smooth and homogenize the intensity distribution of a KrF laser footprint on the surface of a target which is to be ablated. Methods that have been used to avoid nonuniformity in the laser beam footprint; Theory and fabrication of random phase plates; Demonstration of RPP function and properties.
Databáze: Complementary Index