| Autor: |
Jungwon Kang, Carlile, Robert N., O'Hanlon, John F. |
| Předmět: |
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| Zdroj: |
Review of Scientific Instruments; May96, Vol. 67 Issue 5, p1818, 4p, 3 Diagrams, 4 Graphs |
| Abstrakt: |
Discusses a technique for using an emissive probe to measure accurately the time-invariant plasma potential in a radio frequency generated plasma, usually used in plasma processing. Equivalent circuits and theory of operation; Emissive probe system design; Function of the resonant LC circuit; Conditions in order for the inflection point method to be accurate. |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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