Determination of residual stress in Cr-implanted Al[sub 2]O[sub 3] by glancing angle x-ray....

Autor: Specht, E.D., Sparks, C.J.
Předmět:
Zdroj: Applied Physics Letters; 5/4/1992, Vol. 60 Issue 18, p2216, 3p, 5 Graphs
Abstrakt: Identifies the x-ray diffraction of residual stress in sapphire crystals implanted with Cr[sup +] ions. Measurement of both in-plane and out-of-plane lattice constants; Determination of the Bragg peak positions to identify average stress; Consistency of the x-ray residual stress measurements with the indentation crack length.
Databáze: Complementary Index