Fluid simulations of radio frequency glow discharges: Two-dimensional argon discharge including....

Autor: Lymberopoulos, Dimitris P., Economou, Demetre J.
Předmět:
Zdroj: Applied Physics Letters; 11/1/1993, Vol. 63 Issue 18, p2478, 3p, 1 Diagram, 3 Graphs
Abstrakt: Reports 2 dimensional fluid simulation of coupled glow-discharge/neutral-transport-reaction system carried out in gaseous electronics conference reference cell geometry. Study on argon discharge including metastables; Use of Newton-Raphson method; Manifestation of metastable density profile.
Databáze: Complementary Index