| Autor: |
Abril, Isabel, Garcia-Molina, Rafael |
| Předmět: |
|
| Zdroj: |
Applied Physics Letters; 5/29/1995, Vol. 66 Issue 22, p3036, 3p, 2 Graphs |
| Abstrakt: |
Proposes a method to obtain phosphorus doped silicon using proton induced nuclear resonant reactions. Production of novel microstructures in direct phosphorus ion beam implantation; Bombardment of proton beam on a natural silicon producing a silicon matrix; Reduction of target damage caused by direct phosphorus implantation. |
| Databáze: |
Complementary Index |
| Externí odkaz: |
|
