| Autor: |
Suzuki, Chihiro, Kadota, Kiyoshi |
| Předmět: |
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| Zdroj: |
Applied Physics Letters; 10/23/1995, Vol. 67 Issue 17, p2569, 3p, 1 Diagram, 4 Graphs |
| Abstrakt: |
Examines the ground-state CF and CF[sub 2] radicals in high density tetrafluoromethane helicon plasmas using laser-induced fluorescence. Observation on the spatial and temporal behavior of fluoropolymers; Behavior of CF[sub 2] radicals in the afterglow; Effects of fluoropolymers on CF[sub 2] radical concentration in high-density plasma. |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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