Autor: |
Di Trolio, A., Bauer, E. M., Scavia, G., Veroli, C. |
Předmět: |
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Zdroj: |
Journal of Applied Physics; Jun2009, Vol. 105 Issue 11, p113109-113914, 5p, 1 Color Photograph, 4 Graphs |
Abstrakt: |
We have investigated the structural, optical, and electrical properties of alumina-doped zinc oxide (AZO) thin films, grown by pulsed laser deposition. The optical transmittance of the films is over 80% in the visible region, and the absorption edge shifts from about 380 nm of the undoped sample to 320 nm of the AZO film. The calculated optical band gap (Eg) of 2 wt % AZO films shows a widening up to 3.82 eV with respect to the undoped film (3.28 eV). Higher doping concentration (6 wt %) leads to films with larger Eg (4.1 eV), but also epitaxial properties are affected. A further widening of the gap occurs when the AZO films are deposited by lowering the substrate temperature (Ts) from 450 to 250 °C. These blueshifts are respectively attributed to the increase in carrier concentration, induced by Al-donor doping, and also a lower degree of crystalline order. AZO films with doping concentration of 2 wt % show resistivity values of about 10-3 Ω cm and the local I-V curves, measured by scanning tunneling spectroscopy, show higher tunneling current than ZnO film. The Al-doping route proved to be effective in tailoring the optical and electrical properties without essentially affecting the crystalline structure of the films. [ABSTRACT FROM AUTHOR] |
Databáze: |
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