Transmission electron microscopic study of c-BN films deposited on a Si substrate.
Autor: | Watanabe, Syuichi, Miyake, Shojiro |
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Zdroj: | Applied Physics Letters; 3/20/1995, Vol. 66 Issue 12, p1478, 3p, 4 Color Photographs, 1 Diagram |
Abstrakt: | Observes the microstructure of c-BN films characterized by high resolution electron microscopy and microdiffraction. Examination of the ion-plating method; Use of the fourier-transform infrared spectroscopy; Techniques used to obtain evidence of c-BN. |
Databáze: | Complementary Index |
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