Transmission electron microscopic study of c-BN films deposited on a Si substrate.

Autor: Watanabe, Syuichi, Miyake, Shojiro
Předmět:
Zdroj: Applied Physics Letters; 3/20/1995, Vol. 66 Issue 12, p1478, 3p, 4 Color Photographs, 1 Diagram
Abstrakt: Observes the microstructure of c-BN films characterized by high resolution electron microscopy and microdiffraction. Examination of the ion-plating method; Use of the fourier-transform infrared spectroscopy; Techniques used to obtain evidence of c-BN.
Databáze: Complementary Index