| Autor: |
Nagao, S., Fujikane, M., Tymiak, N., Nowak, R. |
| Předmět: |
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| Zdroj: |
Journal of Applied Physics; May2009, Vol. 105 Issue 10, p106104-1-106104-3, 3p, 1 Diagram, 2 Graphs |
| Abstrakt: |
The present study proposes a method for determining indenter shape-independent Young's moduli of thin low-k films from a composite film/substrate nanoindentation response. In contrast to the previous models utilizing empirical fitting parameters, the present authors introduce substrate effect factor determined by the elastic film/substrate mismatch, film thickness, and indenter angle. The new method overcomes several deficiencies of the previous models. Such deficiencies include inability to explain/account for the observed difference in the scale of substrate effect sampled by Berkovich and cube corner indenters. The present model provides consistent Young's moduli of 5.8-6.1 GPa for both types of indenters. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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