| Autor: |
Herzinger, C.M., Johs, B., McGahan, W.A., Woollam, J.A., Paulson, W. |
| Předmět: |
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| Zdroj: |
Journal of Applied Physics; 3/15/1998, Vol. 83 Issue 6, p3323, 14p, 6 Charts, 11 Graphs |
| Abstrakt: |
Examines the simultaneous determination of the optical constant spectra for silicon and thermally grown silicon dioxide. Information on the spectroscopic ellipsometric data; What the resulting thermal silicon dioxide optical constants were shown to be; Reference to the results. |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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