Numerical modelling of electrostatic force microscopes considering charge and dielectric constant.

Autor: Uzzal Binit Bala, Michael Greiff, Thomas Preisner, Wolfgang Mathis
Předmět:
Zdroj: COMPEL; Jan2009, Vol. 28 Issue 1, p109-119, 11p
Abstrakt: The article presents a study which aims to present a hybrid numerical simulation method to calculate potential and electric field distribution considering charge and dielectric constant. The study uses an augmented finite element method (FEM), linear FEM, and boundary element method with an efficient coupling. Results show that the simulation model of microstructured devices is complicated.
Databáze: Complementary Index