Nitrogen and hydrogen in thick diamond films grown by microwave plasma enhanced chemical vapor deposition at variable H... flow rates.
| Autor: | Nistor, S. V., Ralchenko, V. |
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| Zdroj: | Journal of Applied Physics; 6/15/2000, Vol. 87 Issue 12, p8741, 6p, 1 Chart, 5 Graphs |
| Abstrakt: | Presents information on a study which determined the presence and concentration of nitrogen impurities in thick diamond films grown by microwave plasma chemical vapor deposition using electron spin resonance and optical absorption spectroscopy. Experimental details; Results and discussion. |
| Databáze: | Complementary Index |
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