| Autor: |
Kregar, Zlatko, Krstulović, Nikša, Mišević, Slobodan, Kenda, Kiemen, Cvelbar, Uroš, Mozetič, Miran |
| Předmět: |
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| Zdroj: |
IEEE Transactions on Plasma Science; Aug2008 Part 1 of 5, Vol. 36 Issue 4, p1368-1369, 2p, 1 Graph |
| Abstrakt: |
Inductively coupled RF oxygen plasma generated by inductive coil wrapped around a linear glass tube is studied. Images of plasma properties in the linear reactor are presented. Plasma diagnostics was performed by spatially resolved optical emission spectroscopy. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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