Mechanistic study of metalorganic chemical vapor deposition of (Ba,Sr)TiO... thin films.
| Autor: | Gao, Y., Perkins, C. L. |
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| Zdroj: | Journal of Applied Physics; 5/15/2000, Vol. 87 Issue 10, p7430, 8p, 1 Black and White Photograph, 2 Charts, 7 Graphs |
| Abstrakt: | Presents information on a study which examined the metalorganic chemical vapor chemistry of (Ba,Sr)TiO... thin films. Film formation reactions; Film microstructure and step coverage; Experimental details; Results and discussion; Conclusions. |
| Databáze: | Complementary Index |
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