Physically trapped oxygen in sputter-deposited MoO... films.
| Autor: | Vink, T. J., Verbeek, R. G. F. A. |
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| Zdroj: | Journal of Applied Physics; 5/15/2000, Vol. 87 Issue 10, p7252, 3p, 3 Graphs |
| Abstrakt: | Presents information on a study which showed that stoichiometry of sputtered molybdenum oxide films can be changed from oxygen deficient to oxygen rich. Composition of the films; Experimental details; Results and discussion; Conclusions. |
| Databáze: | Complementary Index |
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