| Autor: |
Degl'Innocenti, R., Reidt, S., Guarino, A., Rezzonico, D., Poberaj, G., Günter, P. |
| Předmět: |
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| Zdroj: |
Journal of Applied Physics; 12/1/2006, Vol. 100 Issue 11, p113121, 5p, 6 Diagrams, 4 Graphs |
| Abstrakt: |
We report on a technique for the fabrication of ridge optical waveguides on top of β-BaB2O4 (BBO) crystals. The BBO crystals were first implanted by He+ ions to form planar optical waveguides. In the second step, the femtosecond laser ablation technique was employed for micromachining of ridge-type optical waveguides. A thorough study of material-specific ablation parameters for BBO has been performed in order to achieve ablated structures with smooth sidewalls. A further process of Ar+ ion smoothing in a plasma chamber was used to reduce the sidewall roughness of the ablated ridges from 75 to 35 nm root mean square. We demonstrated optical waveguiding in these femtosecond-ablated plasma-treated waveguides and measured total propagation losses of less than 10 dB/cm at 532 nm, making them suitable for nonlinear- and electro-optical applications. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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