Structure of the GaAs/InP interface obtained by direct wafer bonding optimised for surface...

Autor: Patriarche, G., Jeannés, F., Oudar, J.-L., Glas, F.
Předmět:
Zdroj: Journal of Applied Physics; 11/15/1997, Vol. 82 Issue 10, p4892, 6p, 8 Black and White Photographs, 5 Diagrams, 2 Charts, 1 Graph
Abstrakt: Investigates the structure of a well-bonded interface between two misfitting crystals and the process governing its formation. High reflectivity AlGaAs Bragg reflectors with an InP-based active material; Optimization of the GaAs/AnP bonding process; Development of a technique involving the fabrication of strongly mismatched structures by direct wafer bonding.
Databáze: Complementary Index