Precipitation of Al2Cu in blanket Al-Cu films.

Autor: Marcus, Matthew A., Bower, J. Eric
Předmět:
Zdroj: Journal of Applied Physics; 10/15/1997, Vol. 82 Issue 8, p3821, 7p, 1 Chart, 9 Graphs
Abstrakt: Discusses the use of x-ray absorption spectroscopy to study the formation and dissolution of theta-Al2Cu precipitates in blanket Al-Cu films. Examination of films deposited at different temperatures and average Cu concentrations; Formation of precipitates; Kinetics of precipitation formation and dissolution in Al-).5 w/o Cu.
Databáze: Complementary Index