| Autor: |
Kalkman, A.J., Kalkman, A. J., Verbruggen, A.H., Verbruggen, A. H., Janssen, G.C.A.M., Janssen, G. C. A.M., Groen, F.H., Groen, F. H. |
| Předmět: |
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| Zdroj: |
Review of Scientific Instruments; Oct99, Vol. 70 Issue 10, p4026, 6p, 3 Diagrams, 7 Graphs |
| Abstrakt: |
Constructs a novel bulge-testing apparatus for the mechanical testing of the tensile properties of free-standing thin films. Possibility to measure the elastic modulus, tensile and compressive growth stress in thin films; Stressing of the thin films by a differential gas pressure across the film; Measurement of the growth stress of films deposited under a compressive stress. |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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