| Autor: |
Adrega, T., Chu, V., Conde, J. P. |
| Předmět: |
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| Zdroj: |
Journal of Applied Physics; 5/1/2007, Vol. 101 Issue 9, p094308, 5p, 2 Diagrams, 6 Graphs |
| Abstrakt: |
The resonance of electrostatically actuated thin-film hydrogenated amorphous silicon microbridges in air and immersed in aqueous solutions is measured and characterized. The detection of the resonance frequency of a microbridge operating in aqueous solutions with high electrical conductivities, up to 8 mS/cm, and high viscosities, up to 0.15 Pa s is demonstrated. The range of actuation voltages needed to excite resonance frequencies in the megahertz in these microstructures under aqueous solutions allows electrostatic actuation without electrode screening and electrolysis. Values of the quality factor between 1 and 10 in aqueous solutions will allow the detection of ∼1 pg of added mass to the resonators. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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