| Autor: |
Ravindra, Nuggehalli M., Abedrabbo, Sufian, Wei Chen, Feiming M. Tong, Arun K. Nanda, Speranza, Anthony C. |
| Předmět: |
|
| Zdroj: |
IEEE Transactions on Semiconductor Manufacturing; Feb98, Vol. 11 Issue 1, p30, 10p, 6 Black and White Photographs, 1 Diagram, 42 Graphs |
| Abstrakt: |
Discusses a collaborative project between the New Jersey Institute of Technology (NJIT) and SEMATECH on the temperature-dependent emissivity of silicon-related materials and structures. How have these results been acquired; Effectiveness of the silicon device manufacturing. |
| Databáze: |
Complementary Index |
| Externí odkaz: |
|
