Characterization of interdiffusion around miscibility gap of lattice matched InGaAs/InP quantum wells by high resolution x-ray diffraction.

Autor: Bollet, F., Gillin, W. P.
Předmět:
Zdroj: Journal of Applied Physics; 1/1/2007, Vol. 101 Issue 1, p013502-N.PAG, 7p, 1 Chart, 9 Graphs
Abstrakt: A methodology to characterize of thermally interdiffused heterostructures by high resolution x-ray diffraction is presented. The technique provides detailed information on the strains and compositions generated throughout the interdiffusion process in a 10 nm lattice matched InGaAs/InP sample annealed at 800 °C. It shows that the diffusion process is complex and subject to the influence of the miscibility gap in the quaternary InGaAsP system. The technique also appears to provide a route to mapping the binodal isotherms of the InGaAsP miscibility gap. [ABSTRACT FROM AUTHOR]
Databáze: Complementary Index