| Autor: |
Liu, D. S., Shih, M. K., Liu, S. M., Huang, T., Chao, Y. C., Yu, C. C. |
| Předmět: |
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| Zdroj: |
Experimental Techniques; Sep/Oct2006, Vol. 30 Issue 5, p23-27, 5p, 4 Black and White Photographs, 3 Diagrams, 5 Graphs |
| Abstrakt: |
The article discusses the development of an experimentally aided performance evaluation tool for wafer probe test. It presents the factors to consider in performing stable wafer testing including the shape of the probe, wafer contact speed and overdrive distance. The specifications of the cantilever type W probe and aluminum testing wafer are presented. |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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