CVD Growth of 3C-SiC on 4H/6H MesasThe work at NASA Glenn Research Center was carried out under the Ultra Efficient Engine Technology, Advanced Electrical Components, Revolutionary Aeropropulsion Concepts, and Director's Discretionary Funds projects. The authors gratefully acknowledge the valuable assistance of Michelle Mrdenovich, Beth Osborn, Emye Benavage, Drago Androjna, Glenn Beheim, Gary Hunter, Lawrence Matus, David Larkin, Kimala Laster, Charles Blaha, Mike Artale, Jose Gonzalez, and Pete Lampard at NASA Glenn Research Center.

Autor:	P. G. Neudeck, A. J. Trunek, D. J. Spry, J. A. Powell, H. Du, M. Skowronski, X. R. Huang, M. Dudley
Zdroj:	Chemical Vapor Deposition; Sep2006, Vol. 12 Issue 8/9, p531-540, 10p
Databáze:	Complementary Index
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