Direct Writing of Patterned Ceramics Using Electron-Beam Lithography and Metallopolymer Resists (I.M., H.E.R., and Z.-H.L. thank NSERC for an AGENO grant. I.M. and C.M.Y. thank the Canadian Government for Canadian Research Chairs and the Ontario Government for a PREA Award. I.M. is grateful to U of T for a McLean Fellowship (1997-2003). S.B.C. acknowledges NSERC for a PDF. C.M.Y. also thanks NSERC, ORDCF, CFI and OIT. M.S.R. is grateful for a Walter C. Sumner Memorial Fellowship. R.N.S.S and P.M.B thank the Canadian Foundation for Innovation, Ontario Innovation Trust, U of T, McMaster University, Celestica and Environment Canada. M.R.F. and J.B.S acknowledge support from NSERC, iCORE and K.S. Buchanan for her assistance with the magneto-optic apparatus. H.E.R and S.A. thank NSERC, MMO, CITO, ORDCF, and CIPI.)
Autor: | S. B. Clendenning, S. Aouba, M. S. Rayat, D. Grozea, J. B. Sorge, P. M. Brodersen, R. N. S. Sodhi, Z.-H. Lu, C. M. Yip, M. R. Freeman, H. E. Ruda, I. Manners |
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Zdroj: | Advanced Materials; Feb2004, Vol. 16 Issue 3, p215-219, 5p |
Databáze: | Complementary Index |
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