The effect of as-implanted damage on the microstructure of threading dislocations in MeV...
| Autor: | Bourdelle, K. K., Eaglesham, D. J. |
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| Zdroj: | Journal of Applied Physics; 8/1/1999, Vol. 86 Issue 3, p1221, 5p, 3 Black and White Photographs, 4 Graphs |
| Abstrakt: | Presents information on a study which measured the dose dependence of as-implanted damage and the density of threading dislocations formed after MeV implants in silicon. Experimental details; Results and discussion. |
| Databáze: | Complementary Index |
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